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Title: Single-layer graphene on silicon nitride micromembrane resonators

Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers. Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes. The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.
Authors:
; ; ;  [1] ; ; ; ; ;  [2] ;  [3] ; ;  [4] ;  [5] ; ;  [6]
  1. Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345 East, 2800 Kongens Lyngby (Denmark)
  2. QUANTOP, Niels Bohr Institute, University of Copenhagen, 2100 Copenhagen (Denmark)
  3. Joint Quantum Institute/NIST, College Park, Maryland 20899 (United States)
  4. School of Engineering and Applied Science, Harvard University, Cambridge, Massachusetts 02138 (United States)
  5. Center for Quantum Devices, Niels Bohr Institute, University of Copenhagen, 2100 Copenhagen (Denmark)
  6. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 (United States)
Publication Date:
OSTI Identifier:
22278111
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM; COMPARATIVE EVALUATIONS; COUPLING; GRAPHENE; LAYERS; MECHANICAL PROPERTIES; MEMBRANES; OPTICAL PROPERTIES; QUALITY FACTOR; RESONATORS; SILICON NITRIDES; TRANSDUCERS