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Title: Interface and nanostructure evolution of cobalt germanides on Ge(001)

Cobalt germanide (Co{sub x}Ge{sub y}) is a candidate system for low resistance contact modules in future Ge devices in Si-based micro and nanoelectronics. In this paper, we present a detailed structural, morphological, and compositional study on Co{sub x}Ge{sub y} formation on Ge(001) at room temperature metal deposition and subsequent annealing. Scanning tunneling microscopy and low energy electron diffraction clearly demonstrate that room temperature deposition of approximately four monolayers of Co on Ge(001) results in the Volmer Weber growth mode, while subsequent thermal annealing leads to the formation of a Co-germanide continuous wetting layer which evolves gradually towards the growth of elongated Co{sub x}Ge{sub y} nanostructures. Two types of Co{sub x}Ge{sub y} nanostructures, namely, flattop- and ridge-type, were observed and a systematic study on their evolution as a function of temperature is presented. Additional transmission electron microscopy and x-ray photoemission spectroscopy measurements allowed us to monitor the reaction between Co and Ge in the formation process of the Co{sub x}Ge{sub y} continuous wetting layer as well as the Co{sub x}Ge{sub y} nanostructures.
Authors:
;  [1] ;  [2] ;  [3] ;  [1] ;  [4] ;  [5] ;  [5] ;  [6] ; ;  [2] ;  [1] ;  [7]
  1. IHP, Im Technologiepark 25, 15236 Frankfurt (Oder) (Germany)
  2. London Centre for Nanotechnology, University College London, 17-19 Gordon Street, London, WC1H 0AH,United Kingdom (United Kingdom)
  3. (Poland)
  4. (Italy)
  5. Institute of Physics, Poznan University of Technology, Nieszawska 13A, 60-965 Poznan (Poland)
  6. (Australia)
  7. (Germany)
Publication Date:
OSTI Identifier:
22278033
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 7; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 77 NANOSCIENCE AND NANOTECHNOLOGY; ANNEALING; APPROXIMATIONS; COBALT COMPOUNDS; CRYSTAL STRUCTURE; ELECTRON DIFFRACTION; EMISSION SPECTROSCOPY; GERMANIDES; GERMANIUM; INTERFACES; LAYERS; NANOSTRUCTURES; PHOTOEMISSION; SCANNING TUNNELING MICROSCOPY; SILICON; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0273-0400 K; TRANSMISSION ELECTRON MICROSCOPY; X-RAY SPECTROSCOPY