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Title: Embedded ultrasound sensor in a silicon-on-insulator photonic platform

A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.
Authors:
; ; ; ; ;  [1]
  1. Institute for Biological and Medical Imaging (IBMI), Technische Universität München and Helmholtz Zentrum München, Ingoldstädter Landstraße 1, 85764 Neuherberg (Germany)
Publication Date:
OSTI Identifier:
22275758
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 2; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; GRATINGS; INTERFEROMETRY; PHASE SHIFT; POINT SOURCES; RESONANCE; SENSORS; SILICON; SOUND WAVES; ULTRASONOGRAPHY