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Title: Experimental study on the emission spectra of microwave plasma at atmospheric pressure

An experimental study on microwave plasma at atmospheric pressure was conducted by employing optical emission spectroscopy. Based on a microwave plasma generation device developed for nanoparticle synthesis, we studied the influence of input microwave power and gas flow rate on the optical emission behaviors and electron temperature of plasma using Ar, He, and N{sub 2} as working gas, respectively. The physics behind these behaviors was discussed. The results are useful in characterizing microwave plasma at atmospheric pressure and can be used for improving nanoparticle synthesis system for commercial use in the future.
Authors:
; ;  [1] ;  [1] ;  [2]
  1. Department of Electrical Engineering, Tsinghua University, Beijing 100084 (China)
  2. (China)
Publication Date:
OSTI Identifier:
22275660
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 77 NANOSCIENCE AND NANOTECHNOLOGY; ATMOSPHERIC PRESSURE; ELECTRON TEMPERATURE; EMISSION SPECTRA; EMISSION SPECTROSCOPY; GAS FLOW; MICROWAVE RADIATION; NANOSTRUCTURES; PARTICLE SIZE; PLASMA; PLASMA PRESSURE; PLASMA PRODUCTION; SYNTHESIS