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Title: Multianalyte biosensor based on pH-sensitive ZnO electrolyte–insulator–semiconductor structures

Multianalyte electrolyte–insulator–semiconductor (EIS) sensors with a ZnO sensing membrane annealed on silicon substrate for use in pH sensing were fabricated. Material analyses were conducted using X-ray diffraction and atomic force microscopy to identify optimal treatment conditions. Sensing performance for various ions of Na{sup +}, K{sup +}, urea, and glucose was also tested. Results indicate that an EIS sensor with a ZnO membrane annealed at 600 °C exhibited good performance with high sensitivity and a low drift rate compared with all other reported ZnO-based pH sensors. Furthermore, based on well-established pH sensing properties, pH-ion-sensitive field-effect transistor sensors have also been developed for use in detecting urea and glucose ions. ZnO-based EIS sensors show promise for future industrial biosensing applications.
Authors:
; ;  [1] ; ; ;  [2] ; ;  [3]
  1. Department of Electronic Engineering, Chang Gung University, Kwei-Shan, Tao-Yuan 333, Taiwan (China)
  2. Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, Taiwan (China)
  3. Department of Electronic Engineering, National Chiao Tung University, Hsin-Chu 300, Taiwan (China)
Publication Date:
OSTI Identifier:
22275559
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 18; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; ANNEALING; ATOMIC FORCE MICROSCOPY; COMPARATIVE EVALUATIONS; FIELD EFFECT TRANSISTORS; GLUCOSE; HETEROJUNCTIONS; MEMBRANES; PERFORMANCE; PH VALUE; POTASSIUM IONS; SENSITIVITY; SENSORS; SILICON; SODIUM IONS; SUBSTRATES; UREA; X-RAY DIFFRACTION; ZINC OXIDES