Multianalyte biosensor based on pH-sensitive ZnO electrolyte–insulator–semiconductor structures
- Department of Electronic Engineering, Chang Gung University, Kwei-Shan, Tao-Yuan 333, Taiwan (China)
- Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, Taiwan (China)
- Department of Electronic Engineering, National Chiao Tung University, Hsin-Chu 300, Taiwan (China)
Multianalyte electrolyte–insulator–semiconductor (EIS) sensors with a ZnO sensing membrane annealed on silicon substrate for use in pH sensing were fabricated. Material analyses were conducted using X-ray diffraction and atomic force microscopy to identify optimal treatment conditions. Sensing performance for various ions of Na{sup +}, K{sup +}, urea, and glucose was also tested. Results indicate that an EIS sensor with a ZnO membrane annealed at 600 °C exhibited good performance with high sensitivity and a low drift rate compared with all other reported ZnO-based pH sensors. Furthermore, based on well-established pH sensing properties, pH-ion-sensitive field-effect transistor sensors have also been developed for use in detecting urea and glucose ions. ZnO-based EIS sensors show promise for future industrial biosensing applications.
- OSTI ID:
- 22275559
- Journal Information:
- Journal of Applied Physics, Vol. 115, Issue 18; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
ANNEALING
ATOMIC FORCE MICROSCOPY
COMPARATIVE EVALUATIONS
FIELD EFFECT TRANSISTORS
GLUCOSE
HETEROJUNCTIONS
MEMBRANES
PERFORMANCE
PH VALUE
POTASSIUM IONS
SENSITIVITY
SENSORS
SILICON
SODIUM IONS
SUBSTRATES
UREA
X-RAY DIFFRACTION
ZINC OXIDES