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Title: Simultaneous determination of the elastic modulus and density/thickness of ultrathin films utilizing micro-/nanoresonators under applied axial force

Thin films are widely used in microelectronics, optics, filters, and various sensing devices. We propose a method to simultaneously determine the elastic modulus and density or thickness of ultrathin films deposited on various substrate materials. This methodology utilizes measurement of the resonant frequencies of the micro-/nanoresonator under intentionally applied axial tension and, consequently, the beam to string transition. Elastic modulus and density/thickness of thin film are obtained from the ratio between the resonant frequencies of the nanoresonator with and without applied axial force.
Authors:
 [1] ;  [2] ;  [3] ;  [4] ;  [2] ;  [2]
  1. Institute of Physics, Czech Academy of Sciences, Prague (Czech Republic)
  2. (China)
  3. Institute of Thermomechanics, Czech Academy of Sciences, Prague (Czech Republic)
  4. Institute of Physics, Academia Sinica, Taipei, Taiwan (China)
Publication Date:
OSTI Identifier:
22271157
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 12; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; DENSITY; DEPOSITION; ELASTICITY; RESONATORS; SUBSTRATES; THICKNESS; THIN FILMS; YOUNG MODULUS