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Title: Installation and commissioning of a large area coating system for neutron and X-ray optical devices

A 9 meter long DC/RF sputtering cylindrical coating system which is designed and built indigenously for coating of neutron supermirrors and grazing incidence hard X-ray mirrors on large area substrates has been installed and commissioned recently. The performance of the system has been tested by depositing Ti films on glass substrate of 1500mm X 150mm size. By depositing Ti films on several small area c-Si substrates placed over the length and breadth of the substrate holder, and by subsequent characterization by GIXR measurement, it has been observed that films with bulk-like density and very low surface roughness can be obtained in the above system. The thickness uniformity achieved in the deposited films is within ±3.5% over the 1500mm length and within ±4.8% over the 150mm width.
Authors:
; ; ; ; ; ;  [1] ; ; ; ;  [2] ;  [3]
  1. Atomic and Molecular Physics Division, Bhabha Atomic Research Center, Mumbai-400085 (India)
  2. Division of Remote Handling and Robotics, Bhabha Atomic Research Center, Mumbai-400085 (India)
  3. Solid State Physics Division, Bhabha Atomic Research Center, Mumbai-400085 (India)
Publication Date:
OSTI Identifier:
22271080
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1591; Journal Issue: 1; Conference: 58. DAE solid state physics symposium 2013, Patiala, Punjab (India), 17-21 Dec 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; GLASS; HARD X RADIATION; INCIDENCE ANGLE; MIRRORS; PERFORMANCE; ROUGHNESS; SILICON; SPECTRAL REFLECTANCE; SPUTTERING; SUBSTRATES; SURFACES; THIN FILMS; TITANIUM