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Title: Structure and mechanical properties of 3dTM ion doped RF sputtered ZnO thin films on Si (100)

Mn, Fe and Mn-Fe doped ZnO thin films were deposited on Si (100) substrates by rf- magnetron sputtering using ceramic target in pure oxygen gas environment. The X-ray diffraction shows the polycrystalline wurtzite structure films. The average grain size varies from 32-50 nm, with lower grain size for Fe doped ZnO films. The room temperature loading and unloading curve are continuous without any pop-in. The Young's modulus and hardness are in the range 156-178 GPa and 14-15.5 GPa respectively.
Authors:
;  [1]
  1. School of Physics, University of Hyderabad, Central University P.O, Hyderabad-500046 (India)
Publication Date:
OSTI Identifier:
22271078
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1591; Journal Issue: 1; Conference: 58. DAE solid state physics symposium 2013, Patiala, Punjab (India), 17-21 Dec 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CERAMICS; CRYSTAL STRUCTURE; DOPED MATERIALS; GRAIN SIZE; HARDNESS; OXYGEN; POLYCRYSTALS; PRESSURE RANGE GIGA PA; SILICON; SPUTTERING; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; X-RAY DIFFRACTION; YOUNG MODULUS; ZINC OXIDES