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Title: Resonant x-ray reflectivity study of partial decomposed boron nitride thin films using Indus-1 synchrotron

We determined the microstructural parameters and chemical composition profile of partial decomposed boron nitride thin films using x-ray reflectivity near the respective absorption edges. The elemental specificity and optical contrast variation properties of the resonant effect are utilized to combine chemical analysis with physical microstructure of thin films from x-ray scattered intensities. We demonstrated these aspects through calculations and experiments in the soft x-ray region near the boron K-absorption edge.
Authors:
;  [1]
  1. X-ray Optics Section, Indus Synchrotron Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indore-452013 (India)
Publication Date:
OSTI Identifier:
22271063
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1591; Journal Issue: 1; Conference: 58. DAE solid state physics symposium 2013, Patiala, Punjab (India), 17-21 Dec 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; BORON NITRIDES; CHEMICAL ANALYSIS; CHEMICAL COMPOSITION; CHEMICAL STATE; INDUS-1; K ABSORPTION; MICROSTRUCTURE; REFLECTIVITY; SOFT X RADIATION; SPECIFICITY; THIN FILMS