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Title: Schottky contacts to In{sub 2}O{sub 3}

n-type binary compound semiconductors such as InN, InAs, or In{sub 2}O{sub 3} are especial because the branch-point energy or charge neutrality level lies within the conduction band. Their tendency to form a surface electron accumulation layer prevents the formation of rectifying Schottky contacts. Utilizing a reactive sputtering process in an oxygen-containing atmosphere, we demonstrate Schottky barrier diodes on indium oxide thin films with rectifying properties being sufficient for space charge layer spectroscopy. Conventional non-reactive sputtering resulted in ohmic contacts. We compare the rectification of Pt, Pd, and Au Schottky contacts on In{sub 2}O{sub 3} and discuss temperature-dependent current-voltage characteristics of Pt/In{sub 2}O{sub 3} in detail. The results substantiate the picture of oxygen vacancies being the source of electrons accumulating at the surface, however, the position of the charge neutrality level and/or the prediction of Schottky barrier heights from it are questioned.
Authors:
; ; ;  [1] ;  [2] ;  [3] ;  [4]
  1. Universität Leipzig, Fakultät für Physik und Geowissenschaften, Institut für Experimentelle Physik II, Linnéstrasse 5, 04103 Leipzig (Germany)
  2. Paul Drude Institut für Festkörperelektronik, Hausvogteiplatz 5-7, 10117 Berlin (Germany)
  3. (United States)
  4. Materials Department, University of California, Santa Barbara, California 93106 (United States)
Publication Date:
OSTI Identifier:
22269543
Resource Type:
Journal Article
Resource Relation:
Journal Name: APL Materials; Journal Volume: 2; Journal Issue: 4; Other Information: (c) 2014 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; DEPLETION LAYER; ELECTRIC POTENTIAL; ELECTRONS; FORECASTING; INDIUM OXIDES; OXYGEN; SCHOTTKY BARRIER DIODES; SEMICONDUCTOR MATERIALS; SPECTROSCOPY; SPUTTERING; SURFACES; TEMPERATURE DEPENDENCE; THIN FILMS