skip to main content

SciTech ConnectSciTech Connect

Title: Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer

This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.
Authors:
;  [1] ; ;  [2] ; ;  [3]
  1. Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan (China)
  2. WPI-AIMR, Tohoku University, Sendai (Japan)
  3. Department of Mechanical Engineering, Tohoku University, Sendai (Japan)
Publication Date:
OSTI Identifier:
22269178
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 18; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ELECTRON BEAMS; PHONONS; QUARTZ; SUBSTRATES; THIN FILMS; WAVE PROPAGATION