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Title: Tensile strain mapping in flat germanium membranes

Scanning X-ray micro-diffraction has been used as a non-destructive probe of the local crystalline quality of a thin suspended germanium (Ge) membrane. A series of reciprocal space maps were obtained with ∼4 μm spatial resolution, from which detailed information on the strain distribution, thickness, and crystalline tilt of the membrane was obtained. We are able to detect a systematic strain variation across the membranes, but show that this is negligible in the context of using the membranes as platforms for further growth. In addition, we show evidence that the interface and surface quality is improved by suspending the Ge.
Authors:
; ; ; ; ; ;  [1] ;  [1] ;  [2] ; ;  [3] ;  [4] ;  [4]
  1. Department of Physics, University of Warwick, Coventry, CV4 7AL (United Kingdom)
  2. (United Kingdom)
  3. Diamond Light Source, Harwell Science and Innovation Campus, Didcot, Oxfordshire, OX11 0DE (United Kingdom)
  4. ICN2 - Institut Catala de Nanociencia i Nanotecnologia, Campus UAB, 08193 Bellaterra (Barcelona) (Spain)
Publication Date:
OSTI Identifier:
22267707
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 17; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; GERMANIUM; MEMBRANES; NONDESTRUCTIVE ANALYSIS; SPATIAL RESOLUTION; X-RAY DIFFRACTION