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Title: Modeling the electrode geometry of co-planar capacitors for the microwave dielectric characterization of ceramic thin films

This paper describes the influence of co-planar electrode geometry on the measurement accuracy of microwave dielectric properties of sol-gel-derived Na{sub 0.5}Bi{sub 0.5}TiO{sub 3}-NaTaO{sub 3} thin films. The interdigital, co-planar capacitor configurations were prepared with E-beam lithography. A combination of analytical and numerical modelling was used for the optimization of co-planar, interdigital electrode structures for the thin-film characterization. We observed that the number of fingers, their length, as well as the gap between the fingers of the interdigital electrode structure of the co-planar capacitor have a pronounced influence on the accuracy of measurements.
Authors:
; ;  [1]
  1. Advanced Materials Department, Jozef Stefan Institute, Jamova 39, 1000 Ljubljana (Slovenia)
Publication Date:
OSTI Identifier:
22266145
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 114; Journal Issue: 22; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ACCURACY; CAPACITORS; CERAMICS; CONFIGURATION; DIELECTRIC MATERIALS; DIELECTRIC PROPERTIES; ELECTRODES; ELECTRON BEAMS; GEOMETRY; MICROWAVE RADIATION; OPTIMIZATION; SIMULATION; SOL-GEL PROCESS; THIN FILMS