skip to main content

Title: Highly oriented polycrystalline Cu{sub 2}O film formation using RF magnetron sputtering deposition for solar cells

Room temperature sputtering deposition and re-crystallization of the deposited thin films by rapid thermal annealing have been evaluating in detail as a formation method of Cu{sub 2}O active layer for solar cells, which minimize thermal budget in fabrication processes. Single phase polycrystalline Cu{sub 2}O films were obtained by a magnetron rf sputtering deposition and its crystallinity and electrical characteristics were controlled by the annealing. Hall mobility was improved up to 17 cm{sup 2}V{sup −1}s{sup −1} by the annealing at 600°C for 30s. Since this value was smaller than 47 cm{sup 2}V{sup −1}s{sup −1} of the film deposited under thermal equilibrium state using pulsed laser deposition at 600°C, some contrivances were necessary to compensate the deficiency. It was understood that the sputter-deposited Cu{sub 2}O films on (111)-oriented Pt films were strongly oriented to (111) face also by the self-assembly and the crystallinity was improved by the annealing preserving its orientation. The sputter-deposited film quality was expected to become equivalent to the pulsed laser deposition film from the results of X-ray diffractometry and photoluminescence.
Authors:
; ;  [1]
  1. Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Central 2, Umezono, Tsukuba, Ibaraki 305-8568 (Japan)
Publication Date:
OSTI Identifier:
22266055
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1585; Journal Issue: 1; Conference: IRAGO conference 2013, Aichi (Japan), 24-25 Oct 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; COPPER OXIDES; DEPOSITS; ENERGY BEAM DEPOSITION; LASER RADIATION; MAGNETRONS; PHOTOLUMINESCENCE; POLYCRYSTALS; PULSED IRRADIATION; RECRYSTALLIZATION; SOLAR CELLS; SPUTTERING; THERMAL EQUILIBRIUM; THIN FILMS; X-RAY DIFFRACTION