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Title: HRTEM and XPS study of nanoparticle formation in Zn{sup +} ion implanted Si

The results of investigations of nanoparticles (NPs) formation in a near surface layer of Si substrate after {sup 64}Zn{sup +} ion implantation and thermal annealing are presented. The implantation energy and dose were correspondently E=100keV and D = 2×10{sup 16} cm{sup −2}. Than the samples were subsequently isochronously subjected to furnace annealing during 1h in neutral atmosphere at 400°C and in oxygen atmosphere at 600, 700 and 800°C. The visualization of near surface layer was carried out by transmission electron microscopy with addition of electron diffraction. The energy dispersive spectroscopy was used for value of impurity concentration. The charge state of implanted zinc, silicon matrix atom and oxygen and were carried out by X-ray photoelectron spectroscopy and Auger electron spectroscopy.
Authors:
 [1] ;  [2] ;  [3]
  1. Institute of Physics and Technology of the RAS, Nakhimovskiy prosp.34, 117218 Moscow (Russian Federation)
  2. National University of Science and Technology ''MISiS'', Leninskiy prosp. 4, 119049 Moscow (Russian Federation)
  3. National Research Nuclear University ''MIPhI'', Kashirskoe sh. 31, 115409 Moscow (Russian Federation)
Publication Date:
OSTI Identifier:
22263672
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1583; Journal Issue: 1; Conference: ICDS-2013: 27. international conference on defects in semiconductors, Bologna (Italy), 21-26 Jul 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; ANNEALING; AUGER ELECTRON SPECTROSCOPY; CHARGE STATES; ELECTRON DIFFRACTION; IMPURITIES; ION IMPLANTATION; LAYERS; NANOSTRUCTURES; OXYGEN; SILICON; SUBSTRATES; SURFACES; TRANSMISSION ELECTRON MICROSCOPY; X-RAY PHOTOELECTRON SPECTROSCOPY; ZINC; ZINC 64; ZINC IONS