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Title: High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping

We demonstrate high quality factor thin-film nanocrystalline diamond micromechanical resonators with quality factors limited by thermoelastic damping. Cantilevers, single-anchored and double-anchored double-ended tuning forks, were fabricated from 2.5 μm thick in-situ boron doped nanocrystalline diamond films deposited using hot filament chemical vapor deposition. Thermal conductivity measured by time-domain thermoreflectance resulted in 24 ± 3 W m{sup −1} K{sup −1} for heat transport through the thickness of the diamond film. The resonant frequencies of the fabricated resonators were 46 kHz–8 MHz and showed a maximum measured Q ≈ 86 000 at f{sub n} = 46.849 kHz. The measured Q-factors are shown to be in good agreement with the limit imposed by thermoelastic dissipation calculated using the measured thermal conductivity. The mechanical properties extracted from resonant frequency measurements indicate a Young's elastic modulus of ≈788 GPa, close to that of microcrystalline diamond.
Authors:
 [1] ;  [2] ; ;  [3] ;  [4] ;  [1] ;  [5]
  1. Department of Electrical and Computer Engineering, University of California, Davis, California 95616 (United States)
  2. Department of Mechanical and Aerospace Engineering, University of California, Davis, California 95616 (United States)
  3. Department of Mechanical Engineering, University of California, Berkeley, California 94720 (United States)
  4. Department of Materials Science and Engineering, Materials Research Laboratory, University of Illinois, Urbana, Illinois 61801 (United States)
  5. (United States)
Publication Date:
OSTI Identifier:
22262592
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 15; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYSTALS; DIAMONDS; DOPED MATERIALS; HEAT TRANSFER; MECHANICAL PROPERTIES; NANOSTRUCTURES; QUALITY FACTOR; RESONATORS; THERMAL CONDUCTIVITY; THIN FILMS