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Title: Suspended two-dimensional electron and hole gases

We report on the fabrication of fully suspended two-dimensional electron and hole gases in III-V heterostructures. Low temperature transport measurements verify that the properties of the suspended gases are only slightly degraded with respect to the non-suspended gases. Focused ion beam technology is used to pattern suspended nanostructures with minimum damage from the ion beam, due to the small width of the suspended membrane.
Authors:
; ; ;  [1] ;  [2] ;  [3]
  1. Laboratoire de Photonique et de Nanostructures, CNRS-LPN, Route de Nozay, 91460 Marcoussis (France)
  2. Institut Néel, CNRS-UJF, BP 166, 38042 Grenoble Cedex 9 (France)
  3. Laboratoire de Photonique et de Nanostructures, CNRS-LPN, Route de Nozay, 91460 Marcoussis, France and Laboratoire Kastler Brossel, Université Pierre et Marie Curie, 4 Place Jussieu, 75005 Paris (France)
Publication Date:
OSTI Identifier:
22261805
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1566; Journal Issue: 1; Conference: ICPS 2012: 31. international conference on the physics of semiconductors, Zurich (Switzerland), 29 Jul - 3 Aug 2012; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; ELECTRONS; GASES; ION BEAMS; MEMBRANES; NANOSTRUCTURES