Suspended two-dimensional electron and hole gases
Journal Article
·
· AIP Conference Proceedings
- Laboratoire de Photonique et de Nanostructures, CNRS-LPN, Route de Nozay, 91460 Marcoussis (France)
- Institut Néel, CNRS-UJF, BP 166, 38042 Grenoble Cedex 9 (France)
- Laboratoire de Photonique et de Nanostructures, CNRS-LPN, Route de Nozay, 91460 Marcoussis, France and Laboratoire Kastler Brossel, Université Pierre et Marie Curie, 4 Place Jussieu, 75005 Paris (France)
We report on the fabrication of fully suspended two-dimensional electron and hole gases in III-V heterostructures. Low temperature transport measurements verify that the properties of the suspended gases are only slightly degraded with respect to the non-suspended gases. Focused ion beam technology is used to pattern suspended nanostructures with minimum damage from the ion beam, due to the small width of the suspended membrane.
- OSTI ID:
- 22261805
- Journal Information:
- AIP Conference Proceedings, Vol. 1566, Issue 1; Conference: ICPS 2012: 31. international conference on the physics of semiconductors, Zurich (Switzerland), 29 Jul - 3 Aug 2012; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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