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Title: Zinc oxide thin film acoustic sensor

This paper reports the implementation of (750 nm) thickness of Zinc Oxide (ZnO) thin film for the piezoelectric pressure sensors. The film was prepared and deposited employing the spray pyrolysis technique. XRD results show that the growth preferred orientation is the (002) plane. A polycrystalline thin film (close to mono crystallite like) was obtained. Depending on the Scanning Electron Microscopy photogram, the film homogeneity and thickness were shown. The resonance frequency measured (about 19 kHz) and the damping coefficient was calculated and its value was found to be about (2.5538), the thin film be haves as homogeneous for under and over damped. The thin film pressure sensing was approximately exponentially related with frequency, the thin film was observed to has a good response for mechanical stresses also it is a good material for the piezoelectric properties.
Authors:
; ; ; ;  [1] ;  [2]
  1. Department of Physics , College of Science, Al-Mustansiriyah University, Baghdad (Iraq)
  2. Department of Physics , College of Education, Al-Mustansiriyah University, Baghdad (Iraq)
Publication Date:
OSTI Identifier:
22261709
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1569; Journal Issue: 1; Conference: 3. international advances in applied physics and materials science congress, Antalya (Turkey), 24-28 Apr 2013; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DEPOSITS; GRAIN ORIENTATION; PIEZOELECTRICITY; POLYCRYSTALS; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; THICKNESS; THIN FILMS; X-RAY DIFFRACTION; ZINC OXIDES