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Title: Properties of zinc oxide films grown on sapphire substrates using high-temperature H{sub 2}O generated by a catalytic reaction on platinum nanoparticles

The authors investigated the characteristics of ZnO films grown on a-plane (11-20) sapphire substrates at 773–873 K using a reaction between dimethylzinc and high-temperature H{sub 2}O generated by a catalytic reaction on Pt nanoparticles. The growth rate was 0.02–0.07 μm min{sup −1}. The largest electron mobility and the smallest residual carrier concentration for the ZnO films were 169 cm{sup 2} V{sup −1} s{sup −1} and 1.6 × 10{sup 17} cm{sup −3}, respectively. X-ray diffraction patterns for the ZnO films exhibited intense (0002) and (0004) peaks associated with ZnO (0001) planes. The minimum full width at half maximum of the ω-rocking curve for ZnO (0002) was less than 0.1°. In a ZnO film with a high electron mobility, no rotational domains were identified using a ZnO (10-10) ϕ scan. From secondary ion mass spectroscopy, a hydrogen concentration of 3 × 10{sup 18} cm{sup −3} and a boron concentration of 2–5 × 10{sup 17} cm{sup −3} were determined. These were identified as extrinsic donor impurities.
Authors:
; ; ; ; ;  [1] ;  [2]
  1. Department of Electrical, Electronics and Information Engineering, Nagaoka University of Technology, Nagaoka, Niigata 940-2188 (Japan)
  2. Application Laboratory, Rigaku Corporation, Akishima, Tokyo 196-8666 (Japan)
Publication Date:
OSTI Identifier:
22258775
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 32; Journal Issue: 2; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; BORON; ELECTRON MOBILITY; FILMS; HYDROGEN; ION MICROPROBE ANALYSIS; MASS SPECTROSCOPY; NANOSTRUCTURES; NEUTRON DIFFRACTION; PARTICLES; PLATINUM; SAPPHIRE; SUBSTRATES; TEMPERATURE RANGE 0400-1000 K; WATER; X-RAY DIFFRACTION; ZINC OXIDES