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Title: Defects in nonpolar (134{sup ¯}0) ZnO epitaxial film grown on (114) LaAlO{sub 3} substrate

The defects in (134{sup ¯}0)ZnO epitaxial film grown on (114)LaAlO{sub 3} (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[1{sup ¯}21{sup ¯}0] and 1/2[0001]. Threading dislocations with the Burgers vectors of 1/3〈112{sup ¯}0〉 and 〈0001〉 are distributed on the basal plane. In (134{sup ¯}0)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6〈202{sup ¯}3〉 displacement vectors. The densities of dislocations and BSFs are about 3.8 × 10{sup 10} cm{sup −2} and 3.1 × 10{sup 5} cm{sup −1}, respectively.
Authors:
; ; ; ; ;  [1]
  1. Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan (China)
Publication Date:
OSTI Identifier:
22258761
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 32; Journal Issue: 2; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINATES; BURGERS VECTOR; DEFECTS; DISLOCATIONS; EPITAXY; FILMS; INDIUM 134; LANTHANUM OXIDES; STACKING FAULTS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; ZINC OXIDES