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Title: Photoacoustic elastic bending in thin film—Substrate system

Theoretical model for optically excited two-layer elastic plate, which includes plasmaelastic, thermoelastic, and thermodiffusion mechanisms, is given in order to study the dependence of the photoacoustic (PA) elastic bending signal on the optical, thermal, and elastic properties of thin film—substrate system. Thin film-semiconductor sample (in our case Silicon) is modeled by simultaneous analysis of the plasma, thermal, and elastic wave equations. Multireflection effects in thin film are included in theoretical model and analyzed. Relations for the amplitude and phase of electronic and thermal elastic bending in the optically excited two-layer mechanically-supported circular plate are derived. Theoretical analysis of the thermodiffusion, plasmaelastic, and thermoelastic effects in a sample-gas-microphone photoacoustic detection configuration is given. Two normalization procedures of the photoacoustic elastic bending signal in function of the modulation frequency of the optical excitation are established. Given theoretical model can be used for various photoacoustic detection configurations, for example, in the study of optical, thermal, and elastic properties of the dielectric-semiconductor or metal-semiconductor structure, etc., Theoretical analysis shows that it is possible to develop new noncontact and nondestructive experimental method—PA elastic bending method for thin film study, with possibility to obtain the optical, thermal, and elastic parameters of the film thinner than 1more » μm.« less
Authors:
 [1] ; ;  [2]
  1. Institute for Multidisciplinary Research, University of Belgrade, P.O. Box 33, 11030 Belgrade (Serbia)
  2. Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade-Zemun (Serbia)
Publication Date:
OSTI Identifier:
22258700
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 114; Journal Issue: 21; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 36 MATERIALS SCIENCE; AMPLITUDES; BENDING; DIELECTRIC MATERIALS; ELASTICITY; EXCITATION; LAYERS; METALS; PLATES; SEMICONDUCTOR MATERIALS; SILICON; THERMAL DIFFUSION; THIN FILMS; WAVE EQUATIONS