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Title: Oxygen vacancy defects in Ta{sub 2}O{sub 5} showing long-range atomic re-arrangements

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4869553· OSTI ID:22257814
;  [1]
  1. Engineering Department, Cambridge University, Cambridge CB2 1PZ (United Kingdom)

The structure, formation energy, and energy levels of the various oxygen vacancies in Ta{sub 2}O{sub 5} have been calculated using the λ phase model. The intra-layer vacancies give rise to unusual, long-range bonding rearrangements, which are different for each defect charge state. The 2-fold coordinated intra-layer vacancy is the lowest cost vacancy and forms a deep level 1.5 eV below the conduction band edge. The 3-fold intra-layer vacancy and the 2-fold inter-layer vacancy are higher cost defects, and form shallower levels. The unusual bonding rearrangements lead to low oxygen migration barriers, which are useful for resistive random access memory applications.

OSTI ID:
22257814
Journal Information:
Applied Physics Letters, Vol. 104, Issue 11; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English

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