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Title: Optical knife-edge displacement sensor for high-speed atomic force microscopy

We show that an optical knife-edge technique can be used to detect the parallel shift of an object with sub-nanometer resolution over a wide bandwidth. This allows to design simple, contact-free, and high-speed displacement sensors that can be implemented in high-speed atomic force microscope scanners. In an experimental setup, we achieved a root-mean-square sensor noise of 0.8 nm within a bandwidth from 1 Hz to 1.1 MHz. We used this sensor to detect and correct the nonlinear z-piezo displacement during force curves acquired with rates of up to 5 kHz. We discuss the fundamental resolution limit and the linearity of the sensor.
Authors:
;  [1] ;  [2]
  1. Institute of Applied Physics and LISA, University of Tübingen, Auf der Morgenstelle 10, 72076 Tübingen (Germany)
  2. Institute of Applied Physics, University of Erlangen-Nürnberg, Staudtstraße 7, 91058 Erlangen (Germany)
Publication Date:
OSTI Identifier:
22257070
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 10; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ATOMIC FORCE MICROSCOPY; OPTICAL SYSTEMS; RESOLUTION; SENSORS