skip to main content

Title: Development of a chip-based ingroove microplasma source: Design, characterization, and diagnostics

A chip-based ingroove microplasma source was designed for molecular emission spectrometry by using a space-confined direct current duct in air. The voltage-current characteristics of different size generators, emission spectroscopy of argon were discussed, respectively. It is found that the emission intensity of excited Ar and N{sub 2} approaches its maximum near the cathode, while OH and O peaks most likely appear close to the anode. The electron density, electronic excitation temperature, rotational temperature, and vibrational temperature of the argon plasma were also calculated. More importantly, the chip-based ingroove microplasma shows much better stability compared with its counterparts.
Authors:
; ; ; ; ;  [1] ;  [2]
  1. Research Center of Analytical Instrumentation, College of Chemistry and College of Life Science Sichuan University, Chengdu (China)
  2. State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an (China)
Publication Date:
OSTI Identifier:
22257062
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 10; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 77 NANOSCIENCE AND NANOTECHNOLOGY; ARGON; DESIGN; DIRECT CURRENT; EMISSION SPECTROSCOPY; MICROELECTRONICS; PERFORMANCE; PLASMA