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Title: A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement

Presented in this paper is a micro-resonant acceleration sensor based on the frequency shift of quartz double ended tuning fork (DETF). The structure is silicon substrate having a proof mass supported by two parallel flexure hinges as doubly sustained cantilever, with a resonating DETF located between the hinges. The acceleration normal to the chip plane induces an axial stress in the DETF beam and, in turn, a proportional shift in the beam resonant frequency. Substrate is manufactured by single-crystal silicon for stable mechanical properties and batch-fabrication processes. Electrodes on the four surfaces of DETF beam excite anti-phase vibration model, to balance inner stress and torque and imply a high quality factor. The sensor is simply packaged and operates unsealed in atmosphere for measurements. The tested natural frequency is 36.9 kHz and the sensitivity is 21 Hz/g on a nominally ±100 g device, which is in good agreement with analytical calculation and finite element simulation. The output frequency drifting is less than 0.5 Hz (0.0014% of steady output) within 1 h. The nonlinearity is 0.0019%FS and hysteresis is 0.0026%FS. The testing results confirm the feasibility of combining quartz DETF and silicon substrate to achieve a micro-resonant sensor based on simple processingmore » for digital acceleration measurements.« less
Authors:
; ; ; ;  [1]
  1. State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an, Shannxi 710049 (China)
Publication Date:
OSTI Identifier:
22254976
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 85; Journal Issue: 3; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ACCELERATION; BEAM PRODUCTION; ELECTRODES; FABRICATION; FINITE ELEMENT METHOD; HYSTERESIS; MECHANICAL PROPERTIES; MONOCRYSTALS; QUALITY FACTOR; QUARTZ; SENSORS; SILICON; STRESSES; SUBSTRATES; TUNING