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Title: Selective nano-patterning of graphene using a heated atomic force microscope tip

In this study, we introduce a selective thermochemical nano-patterning method of graphene on insulating substrates. A tiny heater formed at the end of an atomic force microscope (AFM) cantilever is optimized by a finite element method. The cantilever device is fabricated using conventional micromachining processes. After preliminary tests of the cantilever device, nano-patterning experiments are conducted with various conducting and insulating samples. The results indicate that faster scanning speed and higher contact force are desirable to reduce the sizes of nano-patterns. With the experimental condition of 1 μm/s and 24 mW, the heated AFM tip generates a graphene oxide layer of 3.6 nm height and 363 nm width, on a 300 nm thick SiO{sub 2} layer, with a tip contact force of 100 nN.
Authors:
; ;  [1]
  1. MEMS and Nanotechnology Laboratory, School of Mechanical Engineering, Chonnam National University, Gwangju (Korea, Republic of)
Publication Date:
OSTI Identifier:
22254940
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 85; Journal Issue: 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; 36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; EQUIPMENT; FINITE ELEMENT METHOD; GRAPHENE; HEATERS; MACHINING; NANOSTRUCTURES; SILICA; SILICON OXIDES; SUBSTRATES