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Title: Realization of single-termination SrTiO{sub 3} (100) surfaces by a microwave-induced hydrothermal process

A microwave-induced hydrothermal etching of SrTiO{sub 3} (100) single crystal surfaces in deionized water and subsequent annealing in oxygen atmosphere results in single-terminated and atomically flat terraces for pure and niobium-doped substrates as confirmed through one unit-cell step height and uniform phase by atomic force microscopy. This process that requires 3 min of moderate microwave radiation completely avoids the use of hydrofluoric acid (HF) and related point defects due to fluorine in the crystal surface. The advantages of a safe, inexpensive, and environmentally neutral process hold promise to replace the existing standard protocol for substrate preparation based on buffered HF.
Authors:
; ;  [1]
  1. Centre Énergie, Matériaux et Télécommunications, INRS, 1650 Lionel-Boulet, Varennes, Québec J3X1S2 (Canada)
Publication Date:
OSTI Identifier:
22254086
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 20; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ANNEALING; ATOMIC FORCE MICROSCOPY; DOPED MATERIALS; ETCHING; FLUORINE; HYDROFLUORIC ACID; MICROWAVE RADIATION; MONOCRYSTALS; POINT DEFECTS; STRONTIUM TITANATES; SUBSTRATES