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Title: Dopant-induced random telegraph signal in nanoscale lateral silicon pn diodes at low temperatures

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4841735· OSTI ID:22253860
 [1];  [1]; ; ;  [1];  [2];  [3]
  1. Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011 (Japan)
  2. Department of Electrical Engineering, University of Indonesia, Depok, 16424 Jakarta (Indonesia)
  3. Division of Sensors and Measuring Systems, Warsaw University of Technology, Sw. A. Boboli 8, 02-525 Warsaw (Poland)

We studied current-voltage characteristics of nanoscale pn diodes having the junction formed in a laterally patterned ultrathin silicon-on-insulator layer. At temperatures below 30 K, we observed random telegraph signal (RTS) in a range of forward bias. Since RTS is observed only for pn diodes, but not for pin diodes, one dopant among phosphorus donors or boron acceptors facing across the junction is likely responsible for potential changes affecting the current. Based also on potential measurements by low-temperature Kelvin probe force microscope, RTS is ascribed to trapping/detrapping of carriers by/from a single dopant near the farther edge of the depletion region.

OSTI ID:
22253860
Journal Information:
Applied Physics Letters, Vol. 103, Issue 24; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English

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