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Title: Improved strain precision with high spatial resolution using nanobeam precession electron diffraction

NanoBeam Electron Diffraction is a simple and efficient technique to measure strain in nanostructures. Here, we show that improved results can be obtained by precessing the electron beam while maintaining a few nanometer probe size, i.e., by doing Nanobeam Precession Electron Diffraction (N-PED). The precession of the beam makes the diffraction spots more uniform and numerous, making N-PED more robust and precise. In N-PED, smaller probe size and better precision are achieved by having diffraction disks instead of diffraction dots. Precision in the strain measurement better than 2 × 10{sup −4} is obtained with a probe size approaching 1 nm in diameter.
Authors:
;  [1] ;  [1] ;  [2] ;  [3] ; ;  [4]
  1. CEA-INAC/UJF-Grenoble UMR-E, SP2M, LEMMA, Minatec Grenoble F-38054 (France)
  2. (Netherlands)
  3. (EMAT), University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp (Belgium)
  4. CEA, LETI, Minatec, F-38054 Grenoble (France)
Publication Date:
OSTI Identifier:
22253774
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 24; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; ACCURACY; ELECTRON BEAMS; ELECTRON DIFFRACTION; NANOSTRUCTURES; PRECESSION; PROBES; SPATIAL RESOLUTION; STRAINS