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Title: Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications

A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.
Authors:
; ;  [1] ; ; ;  [2] ; ; ; ; ;  [3] ;  [1] ;  [4]
  1. Institute of Photonics and Quantum Sciences, Heriot-Watt University, Edinburgh EH14 4AS (United Kingdom)
  2. School of Engineering and Science, University of the West of Scotland, Paisley PA1 2BE (United Kingdom)
  3. UK Astronomy Technology Centre, Royal Observatory, Edinburgh EH9 3HJ (United Kingdom)
  4. (United Kingdom)
Publication Date:
OSTI Identifier:
22253531
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 85; Journal Issue: 2; Other Information: (c) 2014 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACTUATORS; ASTRONOMY; ERRORS; HYSTERESIS; LASER BEAM MACHINING; LASERS; MIRRORS; PERFORMANCE; PIEZOELECTRICITY