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Title: A highly miniaturized electron and ion energy spectrometer prototype for the rapid analysis of space plasmas

MEMS (Micro Electro-Mechanical Systems) plasma analyzers are a promising possibility for future space missions but conventional instrument designs are not necessarily well suited to micro-fabrication. Here, a candidate design for a MEMS-based instrument has been prototyped using electron-discharge machining. The device features 10 electrostatic analyzers that, with a single voltage applied to it, allow five different energies of electron and five different energies of positive ion to be simultaneously sampled. It has been simulated using SIMION and the electron response characteristics tested in an instrument calibration chamber. Small deviations found in the electrode spacing of the as-built prototype were found to have some effect on the electron response characteristics but do not significantly impede its performance.
Authors:
 [1] ; ;  [2]
  1. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, Sagamihara 252-5210 (Japan)
  2. Mullard Space Science Laboratory, University College London, Holmbury St. Mary RH5 6NT (United Kingdom)
Publication Date:
OSTI Identifier:
22253497
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 85; Journal Issue: 2; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CALIBRATION; CATIONS; DESIGN; ELECTRIC POTENTIAL; ELECTRODES; ELECTROMECHANICS; ELECTROSTATIC ANALYZERS; FABRICATION; MACHINING; MICROSTRUCTURE; PLASMA; SPECTROMETERS