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Title: Characterization of direct current He-N{sub 2} mixture plasma using optical emission spectroscopy and mass spectrometry

Abstract

This study analyses the glow discharge of He and N{sub 2} mixture at the pressure of 2.0 Torr, power of 10 W, and flow rate of 16.5 l/min, by using optical emission spectroscopy and mass spectrometry. The emission bands were measured in the wavelength range of 200–1100 nm. The principal species observed were N{sub 2}{sup +} (B{sup 2}Σ{sup +}{sub u}→X{sup 2}Σ{sup +}{sub g}), N{sub 2} (C{sup 3}Π{sub u}→B{sup 3}Π{sub g}), and He, which are in good agreement with the results of mass spectrometry. Besides, the electron temperature and ion density were determined by using a double Langmuir probe. Results indicate that the electron temperature is in the range of 1.55–2.93 eV, and the electron concentration is of the order of 10{sup 10} cm{sup −3}. The experimental results of electron temperature and ion density for pure N{sub 2} and pure He are in good agreement with the values reported in the literature.

Authors:
; ;  [1]; ;  [2];  [1]
  1. Laboratorio de Espectroscopia, Instituto de Ciencias Físicas, Universidad Nacional Autónoma de México, Apartado Postal 48-3, 62251, Cuernavaca, Morelos (Mexico)
  2. Facultad de Ciencias, Universidad Autónoma del Estado de México, Estado de México (Mexico)
Publication Date:
OSTI Identifier:
22252974
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 21; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; DENSITY; DIRECT CURRENT; ELECTRON TEMPERATURE; ELECTRONS; EMISSION SPECTROSCOPY; GLOW DISCHARGES; LANGMUIR PROBE; MASS SPECTROSCOPY; MIXTURES; PLASMA

Citation Formats

Flores, O., Castillo, F., Martinez, H., Villa, M., Reyes, P. G., Villalobos, S., and Facultad de Ingeniería, Universidad Nacional Autónoma de México, México D.F. Characterization of direct current He-N{sub 2} mixture plasma using optical emission spectroscopy and mass spectrometry. United States: N. p., 2014. Web. doi:10.1063/1.4875343.
Flores, O., Castillo, F., Martinez, H., Villa, M., Reyes, P. G., Villalobos, S., & Facultad de Ingeniería, Universidad Nacional Autónoma de México, México D.F. Characterization of direct current He-N{sub 2} mixture plasma using optical emission spectroscopy and mass spectrometry. United States. https://doi.org/10.1063/1.4875343
Flores, O., Castillo, F., Martinez, H., Villa, M., Reyes, P. G., Villalobos, S., and Facultad de Ingeniería, Universidad Nacional Autónoma de México, México D.F. 2014. "Characterization of direct current He-N{sub 2} mixture plasma using optical emission spectroscopy and mass spectrometry". United States. https://doi.org/10.1063/1.4875343.
@article{osti_22252974,
title = {Characterization of direct current He-N{sub 2} mixture plasma using optical emission spectroscopy and mass spectrometry},
author = {Flores, O. and Castillo, F. and Martinez, H. and Villa, M. and Reyes, P. G. and Villalobos, S. and Facultad de Ingeniería, Universidad Nacional Autónoma de México, México D.F.},
abstractNote = {This study analyses the glow discharge of He and N{sub 2} mixture at the pressure of 2.0 Torr, power of 10 W, and flow rate of 16.5 l/min, by using optical emission spectroscopy and mass spectrometry. The emission bands were measured in the wavelength range of 200–1100 nm. The principal species observed were N{sub 2}{sup +} (B{sup 2}Σ{sup +}{sub u}→X{sup 2}Σ{sup +}{sub g}), N{sub 2} (C{sup 3}Π{sub u}→B{sup 3}Π{sub g}), and He, which are in good agreement with the results of mass spectrometry. Besides, the electron temperature and ion density were determined by using a double Langmuir probe. Results indicate that the electron temperature is in the range of 1.55–2.93 eV, and the electron concentration is of the order of 10{sup 10} cm{sup −3}. The experimental results of electron temperature and ion density for pure N{sub 2} and pure He are in good agreement with the values reported in the literature.},
doi = {10.1063/1.4875343},
url = {https://www.osti.gov/biblio/22252974}, journal = {Physics of Plasmas},
issn = {1070-664X},
number = 5,
volume = 21,
place = {United States},
year = {Thu May 15 00:00:00 EDT 2014},
month = {Thu May 15 00:00:00 EDT 2014}
}