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Title: Numerical simulation of the sustaining discharge in radio frequency hollow cathode discharge in argon

In this paper, a two-dimensional fluid model was developed to study the radio frequency (RF) hollow cathode discharge (HCD) in argon at 1 Torr. The evolutions of the particle density distribution and the ionization rate distribution in RF HCD at 13.56 MHz indicate that the discharge mainly occurs inside the hollow cathode. The spatio-temporal distributions of the ionization rate and the power deposition within the hollow cathode imply that sheath oscillation heating is the primary mechanism to sustain the RF HCD, whereas secondary electron emission plays a negligible role. However, as driving frequency decreases, secondary electron heating becomes a dominant mechanism to sustain the discharge in RF hollow cathode.
Authors:
; ;  [1] ; ;  [2]
  1. School of Physics, Beijing Institute of Technology, Beijing 100081 (China)
  2. Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 10081 (China)
Publication Date:
OSTI Identifier:
22251890
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 21; Journal Issue: 3; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; COMPUTERIZED SIMULATION; ELECTRON EMISSION; HOLLOW CATHODES; RADIOWAVE RADIATION