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Title: A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

We describe a general procedure to calibrate the detection of a nano/micro-mechanical resonator’s displacement as it undergoes thermal Brownian motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function, which is identical in all situations aside from a system-dependent effective mass value. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations. -- Highlights: •Model micro- and nanomechanical resonators displaced by their own thermal motion. •Review the theoretical framework for describing thermomechanical systems. •Present a recipe for measurement calibration on devices of arbitrary shape. •Point out and correct inconsistencies in the existing literature. •Provide an authoritative guide and reference for practitioners in this area.
Authors:
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Publication Date:
OSTI Identifier:
22224253
Resource Type:
Journal Article
Resource Relation:
Journal Name: Annals of Physics (New York); Journal Volume: 339; Other Information: Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; BROWNIAN MOVEMENT; CALIBRATION; EQUATIONS OF MOTION; FINITE ELEMENT METHOD; RESONATORS; SPECTRAL DENSITY