High-resolution mass spectrometer for liquid metal ion sources
- Lehrstuhl für Angewandte Festkörperphysik, Ruhr-Universität Bochum, Universitätsstr. 150, 44780 Bochum (Germany)
- Institut für Experimentelle Physik II, Universität Leipzig, Linnestr. 5, 04103 Leipzig (Germany)
Recently, a mass spectrometer for liquid metal ion sources (LMIS) has been built and set into operation. This device uses an E×B-filter as mass dispersive element and provides sufficient resolution to analyse the emission of clusters from LMIS to much higher mass ranges (>2000 amu) than commercially available mass filters for focused ion beam systems. It has also been shown that for small masses the composition of clusters from different isotopes can be resolved. Furthermore, a rather high fluence of monodisperse clusters in the range of 10{sup 6}–10{sup 7} clusters/s can be achieved with this setup. This makes it a promising tool for the preparation of mass selected clusters. In this contribution, theoretical considerations as well as technical details and the results of first measurements are presented.
- OSTI ID:
- 22224125
- Journal Information:
- Review of Scientific Instruments, Vol. 84, Issue 9; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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