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Title: Dissociation of trimethylgallium on the ZrB{sub 2}(0001) surface

X-ray photoelectron spectroscopy and reflection absorption infrared spectroscopy (RAIRS) have been used to study the dissociative adsorption of trimethylgallium (TMG) on the ZrB{sub 2}(0001) surface. Spectra were obtained as a function of annealing temperature following TMG exposure at temperatures of 95 and 300 K, and also as a function of TMG exposure for a surface temperature of 300 K. After annealing above 220 K, a significant decrease in the relative concentration of carbon and gallium occurred accompanied by a shift of ∼0.2 eV in the Ga 2p{sub 3/2} binding energy. The RAIR spectra show that after annealing to ∼220 K, only one CH{sub 3} deformation band at 1196 cm{sup −1} remains, the intensity of which is considerably decreased indicating loss of at least one methyl group from TMG. Further annealing leads to the sequential loss of the other methyl groups. The first methyl desorbs while the last two dissociate to deposit two C atoms per TMG molecule onto the ZrB{sub 2} surface.
Authors:
;  [1] ;  [2] ;  [3]
  1. Department of Chemistry, University of Illinois at Chicago, 845W Taylor St., Chicago, Illinois 60607 (United States)
  2. National Institute for Material Science, 1-1 Namiki, Tsukuba-shi, Ibaraki 305-0044 (Japan)
  3. Materials Science Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439 (United States)
Publication Date:
OSTI Identifier:
22224111
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 31; Journal Issue: 6; Other Information: (c) 2013 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ABSORPTION; ABSORPTION SPECTROSCOPY; ADSORPTION; ANNEALING; BINDING ENERGY; CARBON; CONCENTRATION RATIO; DEFORMATION; DISSOCIATION; EV RANGE; GALLIUM; INFRARED SPECTRA; MOLECULES; ORGANIC COMPOUNDS; REFLECTION; SURFACES; X-RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM BORIDES