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Title: Direct current-self-sustained non-ambipolar plasma at low pressure

For decades, non-ambipolar diffusion has been observed and studied in laboratory plasmas that contain a double layer. However, self-sustained non-ambipolar plasma has yet to be demonstrated. This article reports the method and results for achieving such a condition at low pressure, with a wide power range (as low as 6 W). The findings reveal that to achieve self-sustained non-ambipolar plasma, both the balance between electron and ion heating and the space-potential gradient are critical. The plasma reactor developed in this work has potential applications that include microelectronic surface processing and space propulsion, via space-charge-neutral plasma-beam thruster, when operated in the high power regime.
Authors:
; ;  [1]
  1. Tokyo Electron America, Inc., 2400 Grove Blvd, Austin, Texas 78741 (United States)
Publication Date:
OSTI Identifier:
22224081
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 25; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; AMBIPOLAR DIFFUSION; BEAMS; DIRECT CURRENT; ELECTRONS; PLASMA HEATING; PLASMA SHEATH; POWER RANGE; PRESSURE RANGE KILO PA; PRESSURE RANGE PA; PROPULSION; SPACE CHARGE; SURFACES; THRUSTERS