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Title: 2-dimensional ion velocity distributions measured by laser-induced fluorescence above a radio-frequency biased silicon wafer

The dynamics of ions traversing sheaths in low temperature plasmas are important to the formation of the ion energy distribution incident onto surfaces during microelectronics fabrication. Ion dynamics have been measured using laser-induced fluorescence (LIF) in the sheath above a 30 cm diameter, 2.2 MHz-biased silicon wafer in a commercial inductively coupled plasma processing reactor. The velocity distribution of argon ions was measured at thousands of positions above and radially along the surface of the wafer by utilizing a planar laser sheet from a pulsed, tunable dye laser. Velocities were measured both parallel and perpendicular to the wafer over an energy range of 0.4–600 eV. The resulting fluorescence was recorded using a fast CCD camera, which provided resolution of 0.4 mm in space and 30 ns in time. Data were taken at eight different phases during the 2.2 MHz cycle. The ion velocity distributions (IVDs) in the sheath were found to be spatially non-uniform near the edge of the wafer and phase-dependent as a function of height. Several cm above the wafer the IVD is Maxwellian and independent of phase. Experimental results were compared with simulations. The experimental time-averaged ion energy distribution function as a function of height compare favorablymore » with results from the computer model.« less
Authors:
; ;  [1] ; ;  [2]
  1. Department of Physics and Astronomy, University of California, Los Angeles, California 90095 (United States)
  2. Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave., Ann Arbor, Michigan 48109-2122 (United States)
Publication Date:
OSTI Identifier:
22220687
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 20; Journal Issue: 8; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ARGON; ARGON IONS; COMPUTERIZED SIMULATION; DISTRIBUTION; DYE LASERS; ENERGY SPECTRA; EV RANGE; FABRICATION; FLUORESCENCE; MHZ RANGE; MICROELECTRONICS; PLASMA; RADIOWAVE RADIATION; SILICON; SPUTTERING; VELOCITY