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Title: Focused electron beam in pyroelectric electron probe microanalyzer

We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.
Authors:
; ;  [1]
  1. Department of Materials Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501 (Japan)
Publication Date:
OSTI Identifier:
22220538
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 84; Journal Issue: 7; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 43 PARTICLE ACCELERATORS; CRYSTALS; ELECTRIC FIELDS; ELECTRON BEAMS; ELECTRON PROBES; FOCUSING; X RADIATION