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Title: Wall current probe: A non-invasive in situ plasma diagnostic for space and time resolved current density distribution measurement

In the context of low temperature plasma research, we propose a wall current probe to determine the local charged particle fluxes flowing to the chamber walls. This non-intrusive planar probe consists of an array of electrode elements which can be individually biased and for which the current can be measured separately. We detail the probe properties and present the ability of the diagnostic to be used as a space and time resolved measurement of the ion and electron current density at the chamber walls. This diagnostic will be relevant to study the electron transport in magnetized low-pressure plasmas.
Authors:
; ;  [1]
  1. Université de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d’énergie), 118 route de Narbonne, F-31062 Toulouse Cedex 9, France and CNRS, LAPLACE, F-31062, Toulouse (France)
Publication Date:
OSTI Identifier:
22220468
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 84; Journal Issue: 8; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; CHARGED PARTICLES; CURRENT DENSITY; ELECTRON DENSITY; ELECTRONS; PLASMA DENSITY; PROBES; TIME RESOLUTION; WALL EFFECTS