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Title: Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces

A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions in reactive sputtering applications. Atom and ion sources are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions, and metal vapor. The heterogeneous surface processes are monitored in situ by means of a quartz crystal microbalance and Fourier transform infrared spectroscopy. Two examples illustrate the capabilities of the particle beam setup: oxidation and nitriding of aluminum as a model of target poisoning during reactive magnetron sputtering, and plasma pre-treatment of polymers (PET, PP)
Authors:
; ; ; ; ;  [1]
  1. RD Plasmas with Complex Interactions, Ruhr-Universität Bochum, Universitätsstr. 150, 44780 Bochum (Germany)
Publication Date:
OSTI Identifier:
22220380
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 84; Journal Issue: 10; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ABSORPTION SPECTROSCOPY; ALUMINIUM; CRYSTALS; FOURIER TRANSFORM SPECTROMETERS; FOURIER TRANSFORMATION; HYDROGEN; INFRARED SPECTRA; ION SOURCES; MAGNETRONS; NITROGEN; OXYGEN; PARTICLE BEAMS; PLASMA; POLYMERS; QUARTZ; RARE GASES; SPUTTERING; SURFACES; VAPORS