Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces

Journal Article · Tue Oct 15 00:00:00 EDT 2013 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4826066· OSTI ID:22220380

Corbella, Carles; Grosse-Kreul, Simon; Kreiter, Oliver; Arcos, Teresa de los; Benedikt, Jan; Keudell, Achim von ^[1]

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1. RD Plasmas with Complex Interactions, Ruhr-Universität Bochum, Universitätsstr. 150, 44780 Bochum (Germany)

A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions in reactive sputtering applications. Atom and ion sources are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions, and metal vapor. The heterogeneous surface processes are monitored in situ by means of a quartz crystal microbalance and Fourier transform infrared spectroscopy. Two examples illustrate the capabilities of the particle beam setup: oxidation and nitriding of aluminum as a model of target poisoning during reactive magnetron sputtering, and plasma pre-treatment of polymers (PET, PP)

• OSTI ID: 22220380
• Journal Information: Review of Scientific Instruments, Vol. 84, Issue 10; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION SPECTROSCOPY
ALUMINIUM
CRYSTALS
FOURIER TRANSFORM SPECTROMETERS
FOURIER TRANSFORMATION
HYDROGEN
INFRARED SPECTRA
ION SOURCES
MAGNETRONS
NITROGEN
OXYGEN
PARTICLE BEAMS
PLASMA
POLYMERS
QUARTZ
RARE GASES
SPUTTERING
SURFACES
VAPORS