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Title: An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions

An innovative experimental equipment allowing to study the sputtering induced by ion beam irradiation is presented. The sputtered particles are collected on a catcher which is analyzed in situ by Auger electron spectroscopy without breaking the ultra high vacuum (less than 10{sup −9} mbar), avoiding thus any problem linked to possible contamination. This method allows to measure the angular distribution of sputtering yield. It is now possible to study the sputtering of many elements such as carbon based materials. Preliminary results are presented in the case of highly oriented pyrolytic graphite and tungsten irradiated by an Ar{sup +} beam at 2.8 keV and 7 keV, respectively.
Authors:
; ; ; ; ;  [1]
  1. CIMAP (CEA-CNRS-ENSICAEN-UCBN), Boulevard Henri Becquerel, BP 5133, 14070 Caen Cedex 5 (France)
Publication Date:
OSTI Identifier:
22220359
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 84; Journal Issue: 9; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 36 MATERIALS SCIENCE; ANGULAR DISTRIBUTION; ARGON IONS; AUGER ELECTRON SPECTROSCOPY; EQUIPMENT; GRAPHITE; ION BEAMS; IRRADIATION; KEV RANGE; MATERIALS; SPUTTERING; TUNGSTEN; YIELDS