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Title: Quadrature phase interferometer for high resolution force spectroscopy

In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the cantilever tip and a reference beam reflecting on the static base of the sensor. A design with very low environmental susceptibility and another allowing calibrated measurements on a wide spectral range are described. Both enable a very high resolution (down to 2.5×10{sup −15} m/√(Hz)), illustrated by thermal noise measurements on AFM cantilevers. They present an excellent long-term stability and a constant sensitivity independent of the optical phase of the interferometer. A quick review shows that our precision is equaling or out-performing the best results reported in the literature, but for a much larger deflection range, up to a few μm.
Authors:
; ;  [1]
  1. Laboratoire de physique, Université de Lyon, ENS Lyon, CNRS, Lyon 69364 (France)
Publication Date:
OSTI Identifier:
22220355
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 84; Journal Issue: 9; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCURACY; ATOMIC FORCE MICROSCOPY; BEAMS; CALIBRATION; INTERFEROMETERS; LASERS; NOISE; QUADRATURES; RESOLUTION; SENSORS; SPECTROSCOPY