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Title: Reduced electron temperature in a magnetized inductively-coupled plasma with internal coil

The effect of magnetic filtering on the electron energy distribution function is studied in an inductive discharge with internal coil coupling. The coil is placed inside the plasma and driven by a low-frequency power supply (5.8 MHz) which leads to a very high power transfer efficiency. A permanent dipole magnet may be placed inside the internal coil to produce a static magnetic field around 100 Gauss. The coil and the matching system are designed to minimize the capacitive coupling to the plasma. Capacitive coupling is quantified by measuring the radiofrequency (rf) plasma potential with a capacitive probe. Without the permanent magnet, the rf plasma potential is significantly smaller than the electron temperature. When the magnet is present, the rf plasma potential increases. The electron energy distribution function is measured as a function of space with and without the permanent magnet. When the magnet is present, electrons are cooled down to low temperature in the downstream region. This region of low electron temperature may be useful for plasma processing applications, as well as for efficient negative ion production.
Authors:
;  [1] ;  [2] ;  [3]
  1. LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau (France)
  2. RF Plasma Consulting, Brookline, Massachusetts 02446 (United States)
  3. (United States)
Publication Date:
OSTI Identifier:
22218573
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 20; Journal Issue: 10; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANIONS; ELECTRON TEMPERATURE; ELECTRONS; ENERGY SPECTRA; HIGH-FREQUENCY DISCHARGES; ION TEMPERATURE; MAGNETIC FIELDS; MAGNETIC FILTERS; MAGNETOHYDRODYNAMICS; MHZ RANGE; PERMANENT MAGNETS; PLASMA; PLASMA POTENTIAL; RADIOWAVE RADIATION