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Title: Effect of antenna size on electron kinetics in inductively coupled plasmas

Spatially resolved measurements of electron energy distribution functions (EEDFs) are investigated in inductively coupled plasmas with two planar antenna coils. When the plasma is sustained by the antenna with a diameter of 18 cm, the nonlocal kinetics is preserved in the argon gas pressure range from 2 mTorr to 20 mTorr. However, electron kinetics transit from nonlocal kinetics to local kinetics in discharge sustained by the antenna coil with diameter 34 cm. The results suggest that antenna size as well as chamber length are important parameters for the transition of the electron kinetics. Spatial variations of plasma potential, effective electron temperature, and EEDF in terms of total electron energy scale are also presented.
Authors:
;  [1]
  1. Department of Electrical Engineering, Hanyang University, Seoul 133-791 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22218485
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 20; Journal Issue: 10; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANTENNAS; ARGON; ELECTRIC DISCHARGES; ELECTRON TEMPERATURE; ELECTRONS; ENERGY SPECTRA; ION TEMPERATURE; LANGMUIR PROBE; PLASMA; PLASMA DIAGNOSTICS; PLASMA POTENTIAL; PLASMA PRESSURE; POTENTIAL ENERGY