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Title: Experiment study of an electron cyclotron resonant ion source based on a tapered resonance cavity

Electron cyclotron resonant plasma is one type of magnetised plasma generated by continuous microwave energy. It has the property of high degree of ionization and large volume at low gas pressure, which makes it useful for space propulsion and material processing. This article presents the experiment study of the plasma properties and ion beam extraction from an electron cyclotron resonant ion source based on a tapered resonance cavity. Optical emission spectroscopy based on a simple collisional radiation model was used for plasma diagnosis. Experiment results show that, at microwave power setting ranging from 7.06 to 17.40 W and mass flow rate ranging from 1 to 10 sccm, argon gas can be ionized. Ion beam of 109.1 mA from the ion source can be extracted at microwave power of 30 W, mass flow rate of 10 sccm, and accel voltage of 800 V. The diagnosed plasma temperature and density are 2.4–5.2 eV and 2 × 10{sup 16}–4.8 × 10{sup 17} m{sup −3}, respectively.
Authors:
; ; ;  [1] ;  [2]
  1. College of Astronautics, Northwestern Polytechnic University, Xi'an, Shaanxi 710072 (China)
  2. Department of Aeronautics and Astronautics, The University of Tokyo, Hongo 7-3-1, Bunkyo, Tokyo 113-8656 (Japan)
Publication Date:
OSTI Identifier:
22218382
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 20; Journal Issue: 12; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; BEAM EXTRACTION; ECR HEATING; ELECTRIC POTENTIAL; ELECTRON TEMPERATURE; ELECTRONS; EMISSION SPECTROSCOPY; FLOW RATE; ION SOURCES; ION TEMPERATURE; IONIZATION; MASS TRANSFER; MICROWAVE RADIATION; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA PRODUCTION; RF SYSTEMS