Cold atomic beam ion source for focused ion beam applications
- Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, Maryland 20899 (United States)
We report measurements and modeling of an ion source that is based on ionization of a laser-cooled atomic beam. We show a high brightness and a low energy spread, suitable for use in next-generation, high-resolution focused ion beam systems. Our measurements of total ion current as a function of ionization conditions support an analytical model that also predicts the cross-sectional current density and spatial distribution of ions created in the source. The model predicts a peak brightness of 2 × 10{sup 7} A m{sup −2} sr{sup −1} eV{sup −1} and an energy spread less than 0.34 eV. The model is also combined with Monte-Carlo simulations of the inter-ion Coulomb forces to show that the source can be operated at several picoamperes with a brightness above 1 × 10{sup 7} A m{sup −2} sr{sup −1} eV{sup −1}. We estimate that when combined with a conventional ion focusing column, an ion source with these properties could focus a 1 pA beam into a spot smaller than 1 nm. A total current greater than 5 nA was measured in a lower-brightness configuration of the ion source, demonstrating the possibility of a high current mode of operation.
- OSTI ID:
- 22218259
- Journal Information:
- Journal of Applied Physics, Vol. 114, Issue 4; Other Information: (c) 2013 © 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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