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Title: The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur et al., J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.
Authors:
; ;  [1] ;  [2]
  1. Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, P.O. Box 49, H-1525 Budapest (Hungary)
  2. Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum (Germany)
Publication Date:
OSTI Identifier:
22218220
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 6; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; ASYMMETRY; COLLISIONS; ELECTRODES; ELECTRON EMISSION; ELECTRONS; HARMONICS; HIGH-FREQUENCY DISCHARGES; NONLINEAR PROBLEMS; PHASE SHIFT; PLASMA; PLASMA SIMULATION; RADIOWAVE RADIATION