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Title: Plasma diagnostic method using intermodulation frequencies in a Langmuir probe

A plasma diagnostic method using intermodulation frequencies is developed. When dual-frequency (ω{sub 1},ω{sub 2}) voltage signals are applied to a probe, the intermodulation frequencies (ω{sub 2}±ω{sub 1}, ω{sub 2}±2ω{sub 1}) between the signals are generated due to the nonlinearity of the sheath. From the analysis of the intermodulation frequencies, the plasma parameters, such as the electron temperature and the plasma density, can be obtained. The measured plasma parameters from this method are compared to the results from the measured electron energy distribution function, and they are in good agreement. Because the intermodulation currents originated from the plasma not from the stray component of the measurement system, an accurate measurement of the plasma parameters is achievable.
Authors:
 [1] ; ; ;  [2]
  1. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul (Korea, Republic of)
  2. Department of Electrical Engineering, Hanyang University, Seoul (Korea, Republic of)
Publication Date:
OSTI Identifier:
22218139
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 8; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; CURRENTS; ELECTRIC POTENTIAL; ELECTRON TEMPERATURE; ENERGY SPECTRA; FUNCTIONS; ION TEMPERATURE; LANGMUIR PROBE; NONLINEAR PROBLEMS; PLASMA DENSITY; PLASMA SHEATH; SIGNALS