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Title: Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas

Excitation and ionization conditions in traveling ionization zones of high power impulse magnetron sputtering plasmas were investigated using fast camera imaging through interference filters. The images, taken in end-on and side-on views using light of selected gas and target atom and ion spectral lines, suggest that ionization zones are regions of enhanced densities of electrons, and excited atoms and ions. Excited atoms and ions of the target material (Al) are strongly concentrated near the target surface. Images from the highest excitation energies exhibit the most localized regions, suggesting localized Ohmic heating consistent with double layer formation.
Authors:
 [1] ;  [2] ; ;  [1]
  1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)
  2. (Singapore)
Publication Date:
OSTI Identifier:
22218127
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Journal Issue: 5; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; DEPOSITION; EXCITATION; HEATING; IMAGES; INTERFERENCE; IONIZATION; MAGNETRONS; PLASMA DENSITY; PLASMA DIAGNOSTICS; PULSES; SPUTTERING; SURFACES; ZONES